JPS6211558U - - Google Patents
Info
- Publication number
- JPS6211558U JPS6211558U JP1985102530U JP10253085U JPS6211558U JP S6211558 U JPS6211558 U JP S6211558U JP 1985102530 U JP1985102530 U JP 1985102530U JP 10253085 U JP10253085 U JP 10253085U JP S6211558 U JPS6211558 U JP S6211558U
- Authority
- JP
- Japan
- Prior art keywords
- driver
- locking
- locking grooves
- arrangement angle
- surface plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985102530U JPH0243655Y2 (en]) | 1985-07-05 | 1985-07-05 | |
| US06/876,690 US4707945A (en) | 1985-07-05 | 1986-06-20 | Upper plate driving system for surface lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985102530U JPH0243655Y2 (en]) | 1985-07-05 | 1985-07-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211558U true JPS6211558U (en]) | 1987-01-24 |
| JPH0243655Y2 JPH0243655Y2 (en]) | 1990-11-20 |
Family
ID=14329859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985102530U Expired JPH0243655Y2 (en]) | 1985-07-05 | 1985-07-05 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4707945A (en]) |
| JP (1) | JPH0243655Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH064506U (ja) * | 1992-06-24 | 1994-01-21 | 象印マホービン株式会社 | 電熱調理器具の安全装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5665656A (en) * | 1995-05-17 | 1997-09-09 | National Semiconductor Corporation | Method and apparatus for polishing a semiconductor substrate wafer |
| US5957763A (en) * | 1997-09-19 | 1999-09-28 | Speedfam Corporation | Polishing apparatus with support columns supporting multiple platform members |
| US5997390A (en) * | 1998-02-02 | 1999-12-07 | Speedfam Corporation | Polishing apparatus with improved alignment of polishing plates |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3290918A (en) * | 1963-12-06 | 1966-12-13 | Anthony V Weasler | Method of manufacturing a shaft coupling |
| US4157637A (en) * | 1977-08-30 | 1979-06-12 | Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana | Planetary-type lapping machine for lapping a group of workpieces |
| US4392759A (en) * | 1981-02-09 | 1983-07-12 | General Electric Company | Quick disconnect mechanism for shafts |
| JPS57168109A (en) * | 1981-04-10 | 1982-10-16 | Shinetsu Eng Kk | Device for measuring thickness of work piece in lapping plate |
-
1985
- 1985-07-05 JP JP1985102530U patent/JPH0243655Y2/ja not_active Expired
-
1986
- 1986-06-20 US US06/876,690 patent/US4707945A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH064506U (ja) * | 1992-06-24 | 1994-01-21 | 象印マホービン株式会社 | 電熱調理器具の安全装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4707945A (en) | 1987-11-24 |
| JPH0243655Y2 (en]) | 1990-11-20 |